Description
The PAS 5500/8TFH-A KrF Step-and-Scan system is a dedicated lithography tool for
thin-film head (TFH) production on 125-mm, 150-mm, and 200-mm AlTiC wafers.
It combines a powerful, variable NA up to 0.8 lens with the proven thick AlTiC wafer
handling of a PAS body and specific alignment improvements for the TFH environment.
The result is a new standard for TFH production at current and future technology nodes.
TFH manufacturing involves printing sub-100-nm isolated features, which demands extremely
low lens aberration levels. The PAS 5500/8TFH-A uses the proven ultra-low aberration KrF lens
from the XT platform on the PAS body, ensuring excellent performance and a low cost of ownership.
The low thermal conductivity of AlTiC wafers means maximum throughput on the track is restricted,
allowing the PAS 5500/8TFH-A more time for alignment and wafer stabilization. In addition,
the PAS 5500/8TFH-A features further improvements to the dynamics.
Together, these translate into industry-leading overlay and stitching performance on AlTiC wafers.
Key Features and Benefits
SmartStart
Enables user-defined wafer accommodation, meandering routing in X, and system start-up via
the job definition to provide stable production performance for small AlTiC wafer batch sizes
in combination with TFH-specific off-line data analysis software.
Proven AlTiC Wafer Handling
Proven handling of 1.2 mm thick (125 mm, 150 mm or 200 mm diameter) and 2.0 mm thick
(125 mm and 150 mm diameter) AlTiC wafers.
KrF Starlith 870 Projection Lens with Variable NA Up to 0.80
Ultra-low aberration levels enable isolated line imaging below 90 nm.
UNICOM, ADE
UNICOM enables automatic optimization of the slit uniformity per illumination setting.
Meanwhile, the automatic DOE exchanger (ADE) can hold up to 5 Diffractive Optical Elements (DOEs).
IOSc-4
The latest overlay capability configuration.
PAS 5500 Step-and-Scan Body
Improved dynamics and interferometer control enable best-in-class performance.
Multiple Exposure Technique
Enables different illumination modes and imaging settings with multiple masks,
and allows userdefined image sequence orders.
开模-样品试作-量产-成品包装-出荷-全程品质监管
在生产过程中严格依照ISO9001、ISO14001、IATF16949等质量管理体系标准严控产品质量,以品质高、交期快、零退货赢得了客户的信赖与支持。
品质保证部由IQC、PQC、OQC、测量室和信赖性实验室组成。
PQC负责产品各生产环节的品质检查把控;
IQC来料检验及供应商监督;
OQC负责出荷前品质检查,保证每一批产品满足客户的品质要求,零退货;
测量室、信赖性实验室共配备了136台监测设备和实验设备,确保产品在各个生产环节的高品质输出。
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协宏公司20多年行业经验,且有自建的22亩产业园,齐全的自动化设备,完善的质检体系,交期有保障。
20多年
行业经验20000㎡
自建厂房36人
研发技术团队150人
生产人员