Configuration

Wafer: 6" or 8" (for other size, please inquire)

Reticle: 6"

General Specification and Information:

Model: FPA 3000 i5

First year available: 1996

Lens Type: UL34-II

Stage Type: FLAT

Chamber Type: CD83

Projection Optics

Projection Magnification: 1/5 X

Exposure Light: 365nm

Numerical Aperture: .45 -.63

Field Size: 22x22 (or 17x26)

Standard Illumination

Light Source: 2.0KW Super High Pressure Hg Lamp

Intensity: 8000 W/m2

Uniformity: < 1.0%

Focus/Leveling Repeatability: <0.10µm (3sigma)

Standard Performance

Resolution: <0.35µm

Depth of Focus: >1.0µm

Image Field Deviation: <.3µm

Distortion: <±0.035µm

Standard Stage Specification

Step Accuracy: <0.03µm (3sigma)

Scaling: <±0.5ppm

Orthogonality: <±0.5ppm

Standard Alignment Specification:

Reticle Rotation Accuracy: <±0.01µm

Wafer Alignment: <0.04µm mean + 3sigma

Reticle Rotation Repeatability: <0.02µm)

Standard Leveling

Leveling Repeatability: <7ppm (3sigma)

Minimum Compensation Range: >100ppm

Reticle: Standard Size 6" square t=0.25" ( Patticle checker)

Wafer Size: Standard 8” ( 6” thru 8” SEMI Standard, Notch / Flat )

Throughput: 74wph (60 shot)90mj/cm ( 8” Wafer)

Chamber Specifications

Chamber Type: CD83

Air Conditioner: Y75-4105-000

Refrigerant: R22

Gram (g): 5000

Pounds (lbs): 11.02