ASML XT 1700Fi 二手翻新光刻机
专业翻新改造ASML光刻机,现货供应ASML PAS 5500 300/350C/750F/850C/8TFH-A/100D/275D/450F/400D/400B/1150C,ASML TWINSCAN AT 850B/AT 850C/AT 1150C/XT 860M/XT 1060K/XT 1460K/XT 1700Fi/XT 1250D/XT 1700Gi等各种型号光刻机,欢迎来电咨询。
产品描述
Transaction Information
Tool ID |
GL04 |
Tool Status |
Running Wafers |
Location |
East Fishkill, USA |
Wafer Size |
300 mm |
Fab Section |
Lithography |
Tool Available Date |
2022-08-15 |
General Product Information
Vendor Supplier |
ASML |
Model |
XT1700Fi |
Vintage |
2007 |
Serial No |
5633 |
Asset Description |
ASML XT1700FI |
Software Version |
5.1 |
CIM |
SECS GEM |
Process |
Immersion Lithography |
Hardware Configuration (Fab)
System Type |
Description |
Quantity |
Status |
Main System |
ASML 1900GI |
1 |
OK |
Handler System |
NA |
|
OK |
Factory Interface |
SMIF |
1 |
OK |
Options System |
|
1 |
OK |
Options System |
Integrated Reticle library |
1 |
OK |
Options System |
EFESE |
1 |
OK |
Options System |
300mm Carrier handler |
1 |
OK |
Options System |
AGILE |
1 |
OK |
Options System |
DoseMapper |
1 |
OK |
Options System |
Athena Narrow Marks |
1 |
OK |
Options System |
DOE exchanger |
1 |
OK |
Options System |
|
|
OK |
Options System |
SMASH Alignment |
1 |
OK |
Options System |
BAseliner Focus |
1 |
OK |
Options System |
Cymer Laser |
1 |
OK |
Options System |
|
1 |
OK |
Options System |
|
1 |
OK |
Options System |
DOE exchanger |
1 |
OK |
Others |
|
|
|
Hardware Configuration (Subfab / Auxilliary Units)
Description |
Quantity |
Status |
Main Body |
1 |
OK |