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ASML XT 1700Fi 二手翻新光刻机


专业翻新改造ASML光刻机,现货供应ASML PAS 5500 300/350C/750F/850C/8TFH-A/100D/275D/450F/400D/400B/1150C,ASML TWINSCAN AT 850B/AT 850C/AT 1150C/XT 860M/XT 1060K/XT 1460K/XT 1700Fi/XT 1250D/XT 1700Gi等各种型号光刻机,欢迎来电咨询。

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产品描述

Transaction Information

Tool ID

GL04

Tool Status

Running Wafers

Location

East Fishkill, USA

Wafer Size

300 mm

Fab Section

Lithography

Tool Available Date

2022-08-15

General Product Information

Vendor Supplier

ASML

Model

XT1700Fi

Vintage

2007

Serial No

5633

Asset Description

ASML XT1700FI

Software Version

5.1

CIM

SECS GEM

Process

Immersion Lithography

Hardware Configuration (Fab)

System Type

Description

Quantity

Status

Main System

ASML 1900GI

1

OK

Handler System

NA

 

OK

Factory Interface

SMIF

1

OK

Options System

 

1

OK

Options System

Integrated Reticle library

1

OK

Options System

EFESE

1

OK

Options System

300mm Carrier handler

1

OK

Options System

AGILE

1

OK

Options System

DoseMapper

1

OK

Options System

Athena Narrow Marks

1

OK

Options System

DOE exchanger

1

OK

Options System

 

 

OK

Options System

SMASH Alignment

1

OK

Options System

BAseliner Focus

1

OK

Options System

Cymer Laser

1

OK

Options System

 

1

OK

Options System

 

1

OK

Options System

DOE exchanger

1

OK

Others

 

 

 

Hardware Configuration (Subfab / Auxilliary Units)

Description

Quantity

Status

Main Body

1

OK

 

 

 

 

 

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