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LAM Research 4520 TCP二手翻新刻蚀机
专业翻新改造Lam各种刻蚀设备，现货供应Lam 2300系列、Lam RST201、Lam SEZ203、Lam Strip45 Chamber、Lam Research 4520 TCP、Lam TCP 9600、Lam TCP 9400等各种型号设备，欢迎来电咨询。
产品描述
技术指标
• Refurbished with installation and warranty
• System can be reconfigured to match Customer specifications.
• Can convert to 6 or 8 system
• Mounting : Bulkhead
• Wafer Size: 200 mm
• Software Envision: 1.52
• Indexers: HINE
• AC Box: -002
• Gas Box: Orbital Welded
• Clamping ESC
• Backside Helium: Closed Loop
• Generator: PDW 2200
• RF Match: LOFAT
• Endpoint: Monochrometer
• MFCs: Unit 1660
• Gas 1 Ar 1000
• Gas 2 N2 200
• Gas 3 O2 200
• Gas 4 CH4 200
• Gas 5 CHF3 50
• Gas 6 SF6 50
• Gas 7 O2 1000
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