Description: Plasma-Therm PECVD / HDPCVD High Density Plasma Deposition for Silicon and Nitride Oxide Films.

Transfer Module (TM): High Throughput Brooks MX600 Vacuum Transport Module, VCE6 Indexing Vacuum Load Locks, Cassette to Cassette, Configurable for 100mm-200mm Wafers, (4) Process Facets, Single Frogleg Transfer Arm, MagnaTran 7 High Speed Vacuum Robot.

Process Modules (x3):PM #1: Versaline PECVD Process Module configured for SiN films. Integrated Multifunctional endpoint capability with EndWorks, Factory Automation compatible (SEC/GEM), MC2 Network Controller. Seren AT-Series Matching Network, VAT Gate Valve, Sieko Seiki incorporated Turbo Pump, Gas Box Flame Detector, S/N:101019338.

Gases: CH-1: SiH4, CH-2: NH3, CH-3: NH3, CH-4: N2O, CH-5:N2O, CH-6: SF6, CH-7: He, CH-8: N2

PM #2: Versaline PECVD Process Module configured for SiN films. Integrated Multifunctional endpoint capability with EndWorks, Factory Automation compatible (SEC/GEM), MC2 Network Controller. Seren AT-Series Matching Network, VAT Gate Valve, Seiko Seiki incorporated Turbo Pump, Gas Box Flame Detector, S/N:101019240.

Gases: CH-1: SiH4, CH-2: NH3, CH-3: NH3, CH-4: N2O, CH-5: N2O, CH-6: SF6, CH-7: He, CH-8: N2.

PM #3: Versaline HDPCVD (High Density Plasma) Process Module configured for SiO2 films. Integrated Multifunctional endpoint capability with EndWorks, Factory Automation compatible (SEC/GEM), MC2 Network Controller. Seren AT-Series Matching Network, VAT Gate Valve, Edwards STP-A1303CV Turbo Pump, Edwards SCU800 STP Control Unit, Gas Box Flame Detector, S/N:101019240. Gases: CH-1: N2, CH-2: O2, CH-3: Ar, CH-4: SF6, CH-5: N2, CH-6: N2, CH-7: SiH4, CH-8: Ar.

Power Supply Units (x3): High Voltage Power Supply Cabinets w/integrated Server Racks, ENI RF Generators S/N: 101019240, 101019240, 10109338 (Qty 3).

Accessories:

• Kashiyama IND., LTD SDE603X-108 Dry Vacuum Pumps (Qty x3)
• Kashiyama IND., LTD MU100XU-027 Dry Vacuum Pump (Qty x1)
• Affinity PWL-003K-BE48CBD3 Recirculating Chiller
• External Computer Docking Stations (x2)
• Mainframe & Controller Cables
• Wafer Size: 150mm, 200mm

• Serial Number(s): 101019240 / 101019338

  Vintage: October 2010 / 2011 Condition: Excellent – No missing Parts Spare Parts: Yes

  Manuals: Yes

  Decon/De-install: January - 2019 Location: Phoenix, AZ USA

• Facility:

• Power Supply

• Voltage: 200-230VAC
• Frequency: 50/60Hz
• Phase: Single
• 4 Wire, 20A