ASML TWINSCAN XT 1250二手翻新光刻机
专业翻新改造ASML光刻机,现货供应ASML PAS 5500 300/350C/750F/850C/8TFH-A/100D/275D/450F/400D/400B/1150C,ASML TWINSCAN AT 850B/AT 850C/AT 1150C/XT 860M/XT 1060K/XT 1460K/XT 1700Fi/XT 1250D/XT 1700Gi等各种型号光刻机,欢迎来电咨询。
产品描述
Equipment Description
70nm resolution, NA 0.6 to 0.85.
Narrow mark is needed
193nm CYMER laser is needed.
Wafer size: 200mm, notch type. 6 inch reticle
26mm*33mm full field size
Double 8 inch wafer stage
IRIS system included
IRL (integrated reticle library)
Software: latest version
Standard PM tools included (standard PM reticles, calibration wafers, standard PM tools )
The latest Coach procedure is needed, with upgrade function and long term license
All FCO upgraded in the factory before shipping.
One set of ASML XT1250 standard documents/manuals.